Residual Gas Adsorption on Electrode Surfaces in Vacuum
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概要
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The pre-breakdown currents of a vacuum gap both just after spark conditioning of the electrodes and after exposure to a vacuum were measured in a vacuum of 3×10^<-5> Pa using a switching impulse voltage. It was found that the exposure reduced the field emission current and that this reduction became greater with the exposure time. The reduction in the field emission current is considered to be the result of an increase in the work function due to adsorption of residual gases on the electrode surfaces. Current pulses were also observed to appear on the pre-breakdown currents measured after exposures of longer than 5 minutes.
- 社団法人応用物理学会の論文
- 1983-06-20
著者
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Yano Mitsuhiro
Da Engineering Department Micro & Custom Lsi Division Toshiba Corporation Semiconductor Company
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Yano Makoto
Department Of Gastroenterology Ehime Prefectural Central Hospital
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Tsuruta Koichi
Department Of Electrical Engineering Faculty Of Engineering Ibaraki University
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Yano Makoto
Department Of Electrical Engineering Faculty Of Engineering Ibaraki University
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