Design Considerations for Silicon Circular Diaphragm Pressure Sensors

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概要

• 論文の詳細を見る

• The design of silicon circular-diaphragm pressure sensors was considered in order to develop highly-accurate pressure sensors. A relatively simple method of stress analysis was proposed. The anisotropy of the elastic properties of silicon, the large deflections of the plates, and elastic deformations of the support structures were taken into account in the stress analysis by the plate theory and the finite element method. Output voltages and their nonlinearities were calculated by applying stress analysis and piezoresistive sensor theories. The calculated results are in close agreement with the experimental results.

• 社団法人応用物理学会の論文
• 1982-07-20

著者

• YASUKAWA Akio

  Mechanical Engineering Research Laboratory, Hitachi Ltd.

• Kanda Yozo

  Department Of Physics Hamamatsu University School Of Medicine

• Yasukawa Akio

  Mechanical Engineering Research Laboratory Hitachi Ltd .

• SHIMADA Satoshi

  Hitachi Research Laboratory, Hitachi Ltd.

• MATSUOKA Yoshitaka

  Naka Works, Hitachi Ltd.

• Matsuoka Yoshitaka

  Naka Works Hitachi Ltd.

• Shimada Satoshi

  Hitachi Research Laboratory Hitachi Ltd.

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