NbN Films Prepared by Magnetron Sputtering
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-05-20
著者
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Akune T
Department Of Electrical Engineering Kyushu Sangyo University
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Sakamoto N
Institute Of Industrial Science University Of Tokyo
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SAKAMOTO Nobuyoshi
Department of Electrical Engineering, Kyushu Sangyo University
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AKUNE Tadahiro
Department of Electrical Engineering, Kyushu Sangyo University
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Akune Tadahiro
Department Of Electrical Engineering Kyusyu Sangyo University
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Shibuya Yoshio
Department of Electrical Engineering, Kyushu Sangyo University
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Shibuya Y
Fuji Industrial Research Institute Of Shizuoka Prefecture
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Shibuya Yoshio
Department Of Electrical Engineering Kyushu Sangyo University
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Sakamoto Nobuyoshi
Department Of Electrical Engineering Kyushu Industrial University
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Sakamoto Nobuyoshi
Department of Electric Engineering, Kyusyu Industrial University
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