Raman Spectroscopy Studies of the Influence of Substrate Temperature and Ion Beam Energy on CN_x Thin Films Deposited by Nitrogen-Ion-Assisted Pulsed Laser Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-08-15
著者
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Chong T.c.
Data Storage Institute 5 Engineering Drive 1(off Kent Ridge Crescent Nus)
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Pang S.i.
Data Storage Institute 5 Engineering Drive 1(off Kent Ridge Crescent Nus)
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Wang J.P.
Data Storage Institute, 5, Engineering Drive 1(Off Kent Ridge Crescent, NUS).
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Ren Z.M.
Laser Microprocessing Laboratory, Department of Electrical and Engineering and Data Storage Institut
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Lu Y.F.
Laser Microprocessing Laboratory, Department of Electrical and Engineering and Data Storage Institut
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Ho H.K.
Laser Microprocessing Laboratory, Department of Electrical and Engineering and Data Storage Institut
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Chong T.C.
Laser Microprocessing Laboratory, Department of Electrical and Engineering and Data Storage Institut
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Cheong B.A.
Data Storage Institute
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Li K.
Institute of Materials Research and Engineering of Singapore
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Wang J.p.
Data Storage Institute 5 Engineering Drive 1(off Kent Ridge Crescent Nus)
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Ho H.k.
Laser Microprocessing Laboratory Department Of Electrical And Engineering And Data Storage Institute
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Ho D.h.k.
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Lu Y.f.
Laser Microprocessing Laboratory Department Of Electrical And Engineering And Data Storage Institute
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Ren Z.m.
Laser Microprocessing Laboratory Department Of Electrical And Engineering And Data Storage Institute
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Chong Tow
Data Storage Institute. Dsi Building
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