Analysis of Local Lattice Strain Around Oxygen Precipitates in Czochralski-Grown Silicon Wafers Using Convergent Beam Electron Diffraction
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-06-15
著者
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Kamei Kazuhito
Electronics Engineering Laboratories Sumitomo Metal Industries Ltd.
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Yonemura Mitsuharu
Electronics Engineering Laboratories Sumitomo Metal Industries Ltd.
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SUEOKA Koji
Electronics Engineering Laboratories, Sumitomo Metal Industries, Ltd.
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Sueoka Koji
Electronics Engineering Laboratories Sumitomo Metal Industries Ltd.
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Kanei Kazuhito
Electronics Engineering Laboratories, Sumitomo Metal Industries, Ltd.
関連論文
- Analysis of Local Lattice Strain Around Oxygen Precipitates in Czochralski-Grown Silicon Wafers Using Convergent Beam Electron Diffraction
- Tunnel-type Giant Magnetoresisitance in Co–Al–Ta–O Insulated Granular System
- TEM Observation of Microstructures in RF-Sputtered Sm-Fe Magnetic Thin Films
- Analysis of Local Lattice Strain Around Oxygen Precipitates in Czochralski-Grown Silicon Wafers Using Convergent Beam Electron Diffraction