A Study of Mechanical Stability Issues in Multilevel Air-Dielectric Interconnect Schemes for ULSIs
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-03-15
著者
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Shibata Hideki
Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory Advanced Microelectronic
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Shibata Hideki
Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory
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ANAND Minakshisundaran
ULSI Process Engineering Laboratory, Microelectronics Engineering Laboratory, Advanced Microelectron
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YAMADA Masaki
ULSI Process Engineering Laboratory, Microelectronics Engineering Laboratory, Advanced Microelectron
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Anand Minakshisundaran
Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory Advanced Microelectronic
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Anand Minakshisundaran
Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory
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Yamada Masaki
Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory Advanced Microelectronic
関連論文
- A Study of Mechanical Stability Issues in Multilevel Air-Dielectric Interconnect Schemes for ULSIs
- A Fully Integrated Aluminum Dual Damascene Process Using a New Double Stopper Structure