Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-09-15
著者
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Saitoh Hidetoshi
Nagaoka University Of Technology
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Saitoh H
Nagaoka Univ. Technol. Niigata
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OHSHIO Shigeo
Nagaoka University of Technology
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INOUE Tohru
Nagaoka Unversity of Technology
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Ohshio Shigeo
Nagaoka Unversity Of Technology
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