The Analysis of the Defective Cells Induces by COP in a 0.3-micron-technology Node DRAM
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-30
著者
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Miura M
Department Of Electrical And Electronic Engineering Faculty Of Engineering Muroran Institute Of Tech
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Makabe Kazuya
Hitachi Ulsi Engineering Corp.
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Kawamura M
Device Development Center Hitachi Ltd.
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MIURA Muneyuki
Tokyo Institute of Technology, Department of Textile and Polymeric Materials
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Kaeriyama Toshiyuki
Semiconductor Group Texas Instruments Inc. Located Device Development Center Hitachi Ltd.
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MURANAKA Masaya
Hitachi ULSI Engineering Corp.
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MIURA Masashi
Hitachi ULSI Engineering Corp.
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KATO Hideaki
Hitachi ULSI Engineering Corp.
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IDE Seihachi
Hitachi ULSI Engineering Corp.
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IWAI Hidetoshi
Device Development Center, Hitachi Ltd.
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KAWAMURA Masao
Device Development Center, Hitachi Ltd.
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TADAKI Yoshitaka
Device Development Center, Hitachi Ltd.
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ISHIHARA Masamichi
Semoconductor & Integrated Circuits Div., Hitachi Ltd.
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Ishihara Masamichi
Semoconductor & Integrated Circuits Div. Hitachi Ltd.
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Iwai Hidetoshi
Device Development Center Hitachi Ltd.
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Tadaki Yoshitaka
Device Development Center Hitachi Ltd.
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