Improvement of the Measurement Precision in an X-Ray Stress Measurement Method for Very Small Areas on Single Crystals

概要

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In an X-ray stress measurement method designed for very small areas on single crystals, the following two measures were put into practice to achieve high-precision measurement. (1) The number of measurements of lattice strains was increased. (2) The distance between diffraction spots from a standard sample and a sample for measurement were made as close as possible, and thereby the positions of these spots were measured. As a result, we were able to decrease the measurement error to below ±10MPa and ±5°.
社団法人応用物理学会の論文
1998-01-15