New Techniques for Simulation of Ion Implantation by Numerical Integration of Boltzmann Transport Equation
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概要
- 論文の詳細を見る
New techniques for more accurate and efficient simulation of ion implantations by a stepwise numerical integration of the Boltzmann transport equation (BTE) have been developed in this work. Instead of using uniform energy grid, a non-uniform grid is employed to construct the momentum distribution matrix, A more accurate simulation result is obtained for heavy ions implanted into silicon. In the same time, rather than utilizing the conventional Lindhard, Nielsen and Schoitt (LNS) approximation, an exact evaluation of the integrals involving the nuclear differential scattering cross-section (dσ_n = 2πp dp) is proposed. The impact parameter p as a function of ion eergy E and scattering angle φ is obtained by solving the magic formula iteratively and an interpolation techniques is devised during the simulation process. The simulation time using exact evaluation is about 3.5 times faster than that using the Littmark and Ziegler (LZ) spline fitted cross-section function for phosphorus implantation into silicon.
- 社団法人応用物理学会の論文
- 1998-01-15
著者
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Wang Shyh-wei
Department Of Electronic Engineering And Institute Of Electronics National Chiao Tung University
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Wang Shyh-web
Department Of Electronic Engineering And Institute Of Electronics National Chiao Tung University Hsi
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GUO Shuang-Fa
Department of Electronic Engineering and Institute of Electronics, National Chiao Tung University, H
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Guo Shuang-fa
Department Of Electronic Engineering And Institute Of Electronics National Chiao Tung University
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Guo Shuang-fa
Department Of Electronic Engineering And Institute Of Electronics National Chiao Tung University Hsi
関連論文
- New Techniques for Simulation of Ion Implantation by Numerical Integration of Boltzmann Transport Equation
- Parallel Simulation of Ion Implantation for Multi-Component Targets Using Boltzmann Transport Equation
- Rational Function Approximation of Nuclear Scattering Cross-Section Function
- Accurate Calculation of Collision Integrals Using Adaptive Methods
- Accurate Calculation of Collision Integrals Using Adaptive Methods