Parallel Simulation of Ion Implantation for Multi-Component Targets Using Boltzmann Transport Equation

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概要

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• A stepwise Boltzmann transport equation (BTE) simulation using non-uniform energy grid momentum matrix and exact nuclear scattering cross-section is successfully parallelized to simulate the ion implantation of multi-component targets. Assuming that the interactions of ion with different target atoms are independent, the scattering of ions with different components can be calculated concurrently by different processors. It is developed on CONVEX SPP-1000 and the software environment of parallel virtual machine (PVM) with a master-slave pauradigm. A speedup of 3.3 has been obtained for the simulation of Asions implanted into AZ1350 (C_<6.2>H_6O_1N_<0.15>S_<0.06>) which is composed of five components. In addition, our new scheme gives better agreement with the experimental results for heavy ion implantation than the conventional method using a uniform energy grid and approximated scattering function.

• 社団法人応用物理学会の論文
• 1998-07-01

著者

• Wang Shyh-wei

  Department Of Electronic Engineering And Institute Of Electronics National Chiao Tung University

• GUO Shuang-Fa

  Department of Electronic Engineering and Institute of Electronics, National Chiao Tung University, H

• Guo Shuang-fa

  Department Of Electronic Engineering And Institute Of Electronics National Chiao Tung University

• Wang Shyh-Wei

  Department of Electronic Engineering and Institute of Electronics, National Chiao Tung University

関連論文

• New Techniques for Simulation of Ion Implantation by Numerical Integration of Boltzmann Transport Equation
• Parallel Simulation of Ion Implantation for Multi-Component Targets Using Boltzmann Transport Equation
• Rational Function Approximation of Nuclear Scattering Cross-Section Function
• Accurate Calculation of Collision Integrals Using Adaptive Methods
• Accurate Calculation of Collision Integrals Using Adaptive Methods

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