Formation of a New Phase in Ru Films by Sputtering Based on Band Calculation Prediction
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概要
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The formation of the metastable Ru films sputtered onto a glass substrate and single crystals with different lattice constants was studied. X-ray diffraction(XRD) and electron beam diffraction(EBD) analyses revealed a new phase that grew on Mo single crystal, which appears to be a single-crystal-like body centered tetragonal structure, although the equilibrium phase is hexagonal close-packed structure. Such phase formation is reasonable considering the total energy calculated by band calculation.
- 社団法人応用物理学会の論文
- 1997-12-15
著者
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Shiiki Kazuo
Department Of Applied Physics And Physico-informatics Keio University
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HIO Okitoshi
Department of Instrumentation Engineering, Faculty of Science and Technology, Keio University
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Hio Okitoshi
Department Of Instrumentation Engineering Faculty Of Science And Technology Keio University
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