Etching Effects on Ferroelectric Capacitors with Multilayered Electrodes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-05-15
著者
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Kim Chang
Materials And Devices Lab Samsung Advanced Institute Of Technology
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Chung Chee
Materials And Devices Research Center Samsung Advanced Institute Of Technology
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Kim Chang
Materials And Devices Research Center Samsung Advanced Institute Of Technology
関連論文
- Isopropanol Effects on the Phase Formation and Texturing of Sol-Gel Derived PMN Thin Films
- Effects of Seeding Layer on Orientation and Phase Formation of Sol-Gel-Derived Lanthanum-Modified Lead Zirconate Titanate Films on Glass
- Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Get Method
- Effects of Seeding Layer on Perovskite Transformation, Microstructure and Transmittance of Sol-Gel-Processed Lanthanum-Modified Lead Zirconate Titanate Films
- Electrical properties of BLT thin films prepared by CSD(chemical Solution Deposition)method
- Electrical properties of BLT thin films prepared by CSD(chemical Solution Deposition)method
- Etching Effects on Ferroelectric Capacitors with Multilayered Electrodes
- Preparation of Room-Temperature Photoluminescent Nanoparticles by Ultrafast Laser Processing of Single-Crystalline Ge