Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials

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概要

著者

Bengtsson Stefan
Department Of Solid State Electronics Chalmers University Of Technology
BERGH Mats
Department of Solid State Electronics, Chalmers University of Technology
CHOUMAS Manolis
Department of Solid State Electronics, Chalmers University of Technology
OLESEN Christian
Department of Solid State Electronics, Chalmers University of Technology
JEPPSON Kjell
Department of Solid State Electronics, Chalmers University of Technology
Bergh Mats
Department Of Solid State Electronics Chalmers University Of Technology
Jeppson Kjell
Department Of Solid State Electronics Chalmers University Of Technology
Choumas Manolis
Department Of Solid State Electronics Chalmers University Of Technology
Olesen Christian
Department Of Solid State Electronics Chalmers University Of Technology
BENGTSSON Stefan
Department of Solid State Electronics, Chalmers University of Technology

関連論文

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