Electrical Methods for Characterizing Directly Bonded Silicon/Silicon Interfaces
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-02-15
著者
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Bengtsson S
Chalmers Univ. Technol. Goeteborg Swe
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Bengtsson Stefan
Department Of Solid State Electronics Chalmers University Of Technology
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ENGSTROM Olof
Department of Solid State Electronics, Chalmers University of Technology
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Engstrom Olof
Department Of Solid State Electronics Chalmers University Of Technology
関連論文
- Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials
- Electrical Methods for Characterizing Directly Bonded Silicon/Silicon Interfaces