Stress Property of SiGe Alloy Deposited by Very Low Pressure Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-06-15
著者
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Zheng Youdou
Department Of Physics & National Laboratory Of Solid State Microstructures Nanjing University
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Zhou Yu-gang
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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ZHANG RONG
Department of Endocrinology and Metabolism, Shanghai Jiao Tong University Affiliated Sixth People's
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GU Shulin
Department of Physics & National Laboratory of Solid State Microstructures, Nanjing University
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HAN Ping
Department of Physics & National Laboratory of Solid State Microstructures, Nanjing University
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Zheng Yujin
Japan E.m.co.
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Zheng Yujin
Applied Physics Department Chongqing University
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Han Ping
Department Of Physics & National Laboratory Of Solid State Microstructures Nanjing University
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Zhang R
Department Of Physics & National Laboratory Of Solid State Microstructures Nanjing University
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Gu Shulin
Department Of Physics & National Laboratory Of Solid State Microstructures Nanjing University
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Zhang Rong
Laboratory Of Advanced Animal And Marine Bioresources Graduate School Of Bioresource And Bioenvironm
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Zhang Rong
Department Of Biochemistry Saga Medical School
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ZHU Shunming
Department of Physics, Nanjing University
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Zhu Shunming
Department Of Physics Nanjing University
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