Parameter Change of Magneto-Plasma-Dynamic Arc-Jet Plasma on a Flow-Facing Plate
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概要
- 論文の詳細を見る
Electron temperature and density of plasma flow, which was obtained from a magneto-plasma-dynamic (MPD) arc jet, were measured by the triple-probe method. In order to apply the MPD arc jet to thin-film processirrg, the changes in the plasma parameters on a processing substrate were investigated.
- 1996-05-15
著者
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Tamaru M
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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Ishiyama Osamu
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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Tamura Hideki
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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SAWAOKA Akira.
Research Laboratory of Engineering Materials, Tokyo Institute of Technology
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TAMARU Masanari
Research Laboratory of Engineering Materials, Tokyo Institute of Technology
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Sawaoka Akira.
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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