Experimental Evalution of Phase Contrast Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-04-15

著者

• Tanaka Shin-ichiro

  Institute For Molecular Science

• FUJISAWA Tadahito

  R & D Center, Toshiba Corporation

• TANAKA Satoshi

  R & D Center, Toshiba Corporation

• INOUE Soichi

  R & D Center, Toshiba Corporation

• Fujisawa Tadahito

  R & D Center Toshiba Corporation

• Inoue Soichi

  R & D Center Toshiba Corporation

• Tanaka Satoshi

  R & D Center Toshiba Corporation

関連論文

• Hall Effect Measurements of Surface Conductive Layer on Undoped Diamond Films in NO_2 and NH_3 Atmospheres
• Possibility of Realizing a Gas Sensor Using Surface Conductive Layer on Diamond Films
• Experimental Evalution of Phase Contrast Lithography
• Charging Effect of Ion Implantation on Glass
• Raman Scattering of InGaAsP Lattice-Matched to GaAs in the Region of Immiseibility
• Elementary Chemical-Reaction Processes on Silicon Surfaces
• Nonlinear Growth of Periodic Ripple Structures with Different Spatial Periods in Laser Etching of GaAs : Etching
• Selective Etching of AI_2O_3 on GaAs using Excimer Lasers : Etching
• Nonlinear Growth of Periodic Ripple Structures with Different Spatial Periods in Laser Etching of GaAs
• Selective Etching of Al_2O_3 on GaAs using Excimer Lasers
• Smoothing of Silica Glass Surfaces by Ion Implantation
• Magneto-Optical Recording Characteristics of TbFeCo Media by Magnetic Field Modulation Method
• Analysis of Compositional Variation at Initial Transient Time in LPE Growth of InGaAsP/GaAs System
• Characterization of Interface Instability in InGaAsP LPE Growth on GaAs by Fourier Analysis
• Unstable Phase-Conjugate Resonator
• Dynamic Recording and Readout Charaeteristics of GdTbFe Using a Modified Magneto-Optical Disk Exerciser
• Synthesis of ZnO Bicrystals Doped with Co or Mn and Their Electrical Properties
• Construction of a Compact Spin- and Angle-Resolved Photoelectron Spectrometer

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