Characterization of Interfaces of Directly Bonded Slicon Wafers: A Comparative Study of Secondary Ion Mass Spectroscopy Multiple Internal Reflection Spectroscopy, and Transmission Electron Microscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-04-15

著者

• Tong Qin-yi

  Wafer Bonding Laboratory School Of Engineering Duke University

• Goesele U

  Max‐planck‐inst. Mikrostrukturphysik Halle/saale Deu

• REICHE Manfred

  Max-Planck-Institut fur Mikrostrukturphysik

• HOPFE Sigrid

  Max-Planck-Institut fur Mikrostrukturphysik

• GOSELE Ullrich

  Max-Planck-Institut fur Mikrostrukturphysik

• STRUZBERG Hartmut

  Institut fur Festkorperanalytik und Partikelmessung GmbH

関連論文

• InGaAs/GaAs Quantum Dot Lasers with Ultrahigh Characteristic Temperature (T_0 = 385 K) Grown by Metal Organic Chemical Vapour Deposition ( Quantum Dot Structures)
• Growth and Characterization of Coherent Quantum Dots Grown by Single- and Multi-Cycle Metal-Organic Chemical Vapour Deposition ( Quantum Dot Structures)
• Characterization of Interfaces of Directly Bonded Slicon Wafers: A Comparative Study of Secondary Ion Mass Spectroscopy Multiple Internal Reflection Spectroscopy, and Transmission Electron Microscopy
• Dislocation-Based Si-Nanodevices
• Fabrication and characteristics of Germanium-on-Insulator

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