Materialistic Difference in Macroscopic Friction Coefficients of Sputtered Metal Oxide Thin Films Deposited on Glass

概要

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The origin of the difference in macroscopic friction coefficients of various metal oxide thin films sputtered on glass substrates was investigated from viewpoints of surface roughness and adhesion. Surface roughness and adhesive force were evaluated by atomic force microscopy (AFM). Thin films of the ZrO_2- SiO_2 system showed a minimum friction coefficient at 50 mol% SiO_2-ZrO_2. This could be explained by an increase in the number of smooth areas on the film surface. ZnO, Al_2O_3, SnO_2, TiO_2 and Ta_2O_5 thin films showed friction coefficients which varied from material to material. Oxide films with weaker metal-oxygen (M-O) bond were found to become highly frictive. This could be understood by the difference in the number of bonds formed between the film surface and the opponent material.
社団法人応用物理学会の論文
1996-03-15