Study on Microstructures and Interdiffusion Behavior in Pt/Ti/SiO_2/Si and Pb(Zr, Ti)O_3/Pt/Ti/SiO_2/Si Multilayer Systems
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-09-15
著者
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Kim Cha-yeon
Lg Electronics Research Center
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Kim Sung-tae
Lg Electronics Research Center
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Kwon Hyun
Lg Electronics Research Center
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Kim Kwang-Young
LG Electronics Research Center
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Park Kyu-ho
Lg Electronics Research Center
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Lee Jeong
Lg Electronics Research Center
-
JEONG Young
LG Electronics Research Center
関連論文
- Microstructures and Electrical Properties of (Pb, La)TiO_3 Thin Films Grown on the Pt Electrodes with a Percolating Network Structure
- Study on Microstructures and Interdiffusion Behavior in Pt/Ti/SiO_2/Si and Pb(Zr, Ti)O_3/Pt/Ti/SiO_2/Si Multilayer Systems