Characterization of Interdiffusion in SrTiO_3/YBa_2Cu_3O_<7-x> Multilayers by In Situ Auger Electron Spectroscopy

概要

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In situ deposition and surface characterization by Auger electron spectroscopy enabled precise surface composition analysis. The annealing temperature dependence of the surface composition in SrTiO_3(2.8 nm)/YBa_2Cu_3O_<7-x> and YBa_2Cu_3O_<7-x>(2.7 nm)/SrTiO_3 multilayers revealed the diffusion of each of the constituent atoms. The interdiffusion is negligible below 600℃. Ba atom diffusion into SrTiO_3 was dominant in the temperature range from 600℃ to 660℃. The activation energy was calculated to be 2.4 eV. Ti atom diffusion into YBa_2Cu_3O_<7-x> became distinctive above 660℃. The activation energy of Ti was 4.4 eV.
社団法人応用物理学会の論文
1995-09-15