Three-Dimensional Simulation of Target Erosion in DC Magnetron Sputtering (<Special Issue> Plasma Processing)

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-07-30

著者

• Nemoto M

  Univ. Tsukuba Tsukuba Sci. City Jpn

• Nomura Takuji

  Research Center Asahi Glass Co. Ltd.

• SHIDOJI Eiji

  Research Center, Asahi Glass Co., Ltd.

• Shidoji E

  Asahi Glass Co. Ltd. Yokohama Jpn

• Shidoji Eiji

  Research Center Asahi Glass Co. Ltd.

• NEMOTO Masaharu

  Research Center, Asahi Glass Co., Ltd.

• YOSHIKAWA Yukio

  Research Center, Asahi Glass Co., Ltd.

• Yoshikawa Y

  Research Center Asahi Glass Co. Ltd.

• Nemoto Masaharu

  Research Center Asahi Glass Co. Ltd.

関連論文

• Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge
• Three-Dimensional Simulation of Target Erosion in DC Magnetron Sputtering ( Plasma Processing)
• Improving Mobility of F-Doped SnO Thin Films by Introducing Temperature Gradient during Low-Pressure Chemical Vapor Deposition

スポンサーリンク