Residual Aberrations and Beam Trajectories of Electron Beam Reducing Image Projection System with Dynamically Compensated Field Aberrations

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概要

• 論文の詳細を見る

• Calculation formulae for the residual field curvature, astigmatism and distortion aberrations are made. The resolution of a typical symmetrical magnetic doublet with dynamically compensated field aberrations is limited by the diffraction, the residual field curvature and astigmatism aberrations. From the beam trajectories, it has been clarified that distortion is generated because the crossover is shifted from the normal position in the direction of the object for the outer trajectories by the spherical aberration of the first projection lens, and that the distortion is reduced if the crossover position for each trajectory is corrected to the normal position. With this correction, the field curvature and astigmatism are not changed. For a 1.5 m optical path length from the object to the image and for 20 and 0.25 mm of main- and subfield sizes, respectively, the residual beam resolution and distortion are 33 and 1.1 nm, respectively, when the beam energy is 50 keV.

• 社団法人応用物理学会の論文
• 1994-02-15

著者

• Nakasuji Mamoru

  Ohi Plant 2nd Designing Department Nikon Corporation

• SHIMIZU Hiroyasu

  Ohi Plant, NIKON Corporation

• Shimizu Hiroyasu

  Ohi Plant 2nd Designing Department Nikon Corporation

関連論文

• Spherical and Chromatic Aberration Correction using Aperture Lens : Computer Simulation
• Residual Aberrations and Beam Trajectories of Electron Beam Reducing Image Projection System with Dynamically Compensated Field Aberrations
• Reduction Mechanism for Spherical and Chromatic Aberration Coefficients of Magnetic Lens and Retarding Electric Fields

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