Spherical and Chromatic Aberration Correction using Aperture Lens : Computer Simulation

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概要

• 論文の詳細を見る

• The electron trajectories from a Pierce-type electron gun are calculated. The aperture lens which is formed by an anode hole acts as a concave lens and produces negative-sign spherical and chromatic aberrations. The negative-sign focal length which is calculated by the trajectories coincides with the value calculated by the formula derived by Davisson and Calbick 60 years ago. For an electrode of practical size, the negative-sign spherical and chromatic aberration coefficients are on the order of 1O^0 to 10^2 m and of 10^<-3> to 10^<-1> m, respectively. It is shown that when the electron beam from this type of electron gun is focused by a magnetic lens, most of the spherical aberration is compensated. These aperture lenses are expected to improve the characteristics of the charged particle beam systems.

• 社団法人応用物理学会の論文
• 1993-03-15

著者

• Nakasuji M

  Nikon Corp. Tokyo Jpn

• Nakasuji Mamoru

  Ohi Plant 2nd Designing Department Nikon Corporation

• SHIMIZU Hiroyasu

  Ohi Plant, NIKON Corporation

• Shimizu Hiroyasu

  Ohi Plant 2nd Designing Department Nikon Corporation

• Shimizu Hiroyasu

  Ohi Plant Nikon Corporation

関連論文

• Spherical and Chromatic Aberration Correction using Aperture Lens : Computer Simulation
• Residual Aberrations and Beam Trajectories of Electron Beam Reducing Image Projection System with Dynamically Compensated Field Aberrations
• Reduction Mechanism for Spherical and Chromatic Aberration Coefficients of Magnetic Lens and Retarding Electric Fields

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