Gap Structure Multilayer Piezoelectric Actuator : Piezoelectrics

概要

論文の詳細を見る
A new multilayer piezoelectric actuator (MPA), in which gaps were formed at the ends of the internal electrodes, was manufactured by a cofiring method. Its high endurance has been confirmed both by a 500-million-pulse driving test and by 120 VDC voltage-applying life test for 500 hours under high humidity. Large displacement was achieved in a wide temperature range up to 135℃ by using newly developed piezoelectric ceramics.
社団法人応用物理学会の論文
1991-09-30