Heteroepitaxial Growth of LiTaO_3 Single-Crystal Films by RF Magnetron Sputtering : Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-09-30
著者
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SAITO Yasuyoshi
Toyota Central R&D Labs., Inc.
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SHIOSAKI Tadashi
Deapartment of Electronics, Faculty of Engineering, Kyoto University
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Shiosaki Tadashi
Deapartment Of Electronics Faculty Of Engineering Kyoto University
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- Heteroepitaxial Growth of LiTaO_3 Single-Crystal Films by RF Magnetron Sputtering : Thin Films
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