A Photon Scanning Tunneling Microscope Using an AlGaAs Laser
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概要
- 論文の詳細を見る
A novel super-resolution photon scanning tunneling microscope (PSTM) using diode lasers and optical fibers was demonstrated to measure the samples with submicron structure in a noncontact and nondestructive manner. A reproducible method for fabrication of the fiber probe with the tip curvature radius of 80 nm is reported. The step with the height of 9 nm, optical disk with submicron-sized pits similar to moth-eye structure, and latex particles with 80 nm in diameter have been observed. To the best of our knowledge, this is line smallest particle size resolved by the PSTM.
- 社団法人応用物理学会の論文
- 1991-09-15
著者
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Jiang Shudong
Graduate School At Nagatsuta Tokyo Institute Of Technology
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Ohtsu Motoichi
Graduate School At Nagatsuta Tokyo Institute Of Technology
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TOMITA Naoyuki
Graduate School at Nagatsuta, Tokyo Institute of Technology
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OHSAWA Hisaoh
Nikon Corporation
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Tomita Naoyuki
Graduate School At Nagatsuta Tokyo Institute Of Technology
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- A Photon Scanning Tunneling Microscope Using an AlGaAs Laser