Pressure Dependence of the Formation of YBaCuO Films by Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-09-15

著者

• Park J‐s

  Hynix Semiconductor Inc. Cheongju Chungbuk Kor

• Kim C‐t

  Goldstar Central Res. Lab. Seoul Kor

• SHIN Hyung-Shik

  Department of Periodontology, School of Dentistry, Wonkwang University

• Park J‐s

  Memory R&d Division Hynix Semiconductor Inc.

• Kim C‐j

  Seoul City Univ. Seoul. Kor

• Shin H‐s

  Kongju National Univ. Kongju Kor

• LEE Hee-Gyoun

  Korea Atomic Energy Research Institute

• WON Dong-Yeon

  Korea Atomic Energy Research Institute

• PARK Joung-Shik

  Department of Chemical Engineering, Chonbuk National University

• KIM Chun-Young

  Department of Chemical Engineering, Chonbuk National University

• KIM Chan-Joong

  Korea Atomic Energy Research Institute

• Shin Hyung-shik

  Department Of Chemical Engineering Chonbuk National Univetsity

• Kim Chun-young

  Department Of Chemical Engineering Chonbuk National University

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• Preparation of YBaCuO Film on a MgO Substrate by Chemical Vapor Deposition at 650℃
• Pressure Dependence of the Formation of YBaCuO Films by Chemical Vapor Deposition
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