Ion Energy Distribution of 13.56 MHz rf Glow Discharges in a Planar System Cathode

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-08-15

著者

• Ohara K

  Research Institute Of Electrical Communication Tohoku University

• OTSUBO Toru

  Production Engineering Research Laboratory, Hitachi, Ltd.

• OHARA Kazuhiro

  Production Engineering Research Laboratory, Hitachi, Ltd.

• Otsubo Toru

  Production Engineering Research Laboratory Hitachi Ltd.

関連論文

• New Functions of Scanning Nonlinear Dielectric Microscopy -Higher-Order Measurement and Vertical Resolution-
• Quantitative Measurement of Linear and Nonlinear Dielectric Characteristics Using Scanning Nonlinear Dielectric Microscopy
• Ion Energy Distribution of 13.56 MHz rf Glow Discharges in a Planar System Cathode

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