X-Ray Focusing with Elliptical Kirkpatrick-Baez Mirror System

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概要

• 論文の詳細を見る

• Focusing Properties of a grazing-incidence mirror system are tested using a monochromatized synchrotron radiation X-ray source. The optical system employs two mirrors, each of elliptical cylinder shape, arranged in a crossed-mirror geometry (Kirkpatrick-Baez configuration) and generates a demagnified image of a 100-μm-diameter pinhole placed upstream in the beamline as the X-ray source. Edge-scan profiles show the focused spot size at half-maximum of about 1.7 μm×3.8 μm at a wavelength of 2.3 Å. In two-dimensional scanning of test patterns, a fine pattern of a 0.6 μm line and 0.6 μm space was resolved.

• 社団法人応用物理学会の論文
• 1991-05-15

著者

• SUZUKI Yoshio

  Advanced Research Laboratory, Hitachi Ltd.

• Uchida Fumihiko

  Central Research Laboratory Hitachi Ltd.

• Suzuki Yoshio

  Advanced Research Laboratory Hitachi Ltd.

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