Intensity Profiling of an Unattenuated, Focused High Power cw Argon-Ion Laser Beam

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概要

• 論文の詳細を見る

• In this paper a high resolution laser beam intensity profiler is proposed which is capable of profiling focused high power cw Ar^+-laser beams without any prior attenuation of the laser beam. The profiler makes use of a pinhole scanned across the laser spot to be measured. The method of extraction of the parameters which characterize the intensity profile of the laser spot, such as spot size and higher-order Transversal Electromagnetic (TEM) mode content, is discussed. Finally some applications of the high resolution intensity profiler are treated.

• 社団法人応用物理学会の論文
• 1991-03-15

著者

• Willems G.j.

  Interuniversity Microelectronics Center (imec)

• Maes H.e.

  Interuniversity Microelectronics Center (imec)

• MAES H.E.

  Interuniversity Micro-Electronics Center

関連論文

• Intensity Profiling of an Unattenuated, Focused High Power cw Argon-Ion Laser Beam
• Different Defect Patterns in Stacked Silicon Films Obtained by Radiative-Heating Zone-Melting Recrystallization

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