Discharge Plasma and Sheath as a Stochastic Process : What the |f|^<-α> Power Spectral Law Implies

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概要

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• Noise signals detected with a Langmuir probe from a DC magnetron plasma device are discussed. Noise spectra were characterized by the |f|^<-α> power law with α being the constant stochastic index. α ranged between 2.5 and 5.5 in the frequency range of 0.1<f<2 MHz and was formulated by α≈log_e 16I^<0.6>_<d> with I_d being the discharge current in milliampere. The noise spectra are discussed by the autocorrelation function which reveals a memory included in the signals. It is stressed that noise is related to the formation of a sheath (boundary layer) across which charged particles are transported. It is analogized to cell membrane noise and cosmic noise.

• 社団法人応用物理学会の論文
• 1991-01-15

著者

• Tanizuka Noboru

  Integrated Arts & Sciences, University of Osaka Prefecture

• Tanizuka Noboru

  Integrated Arts And Sciences University Of Osaka Prefecture

関連論文

• NATURES ON THE FLUCTUATIONS OF THE INTENSITY OF MICROWAVE FROM TWENTY EIGHT QUASARS(Session I : Cross-Disciplinary Physics, The 1st Tohwa University International Meeting on Statistical Physics Theories, Experiments and Computer Simulations)
• Discharge Plasma and Sheath as a Stochastic Process : What the |f|^ Power Spectral Law Implies
• Plasma Processing Control by a Magnetic Field Crossed to a Sheath Electric Field

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