Evaporation Source for Deposition of Protective Layers inside Tubes

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概要

• 論文の詳細を見る

• A heated cathode arc can be ignited in vacuum in the vapours of the anode material due to the accelerated electron beam from the cathode. A small assembly, consisting of an electron gun as the cathode and a refractory metal crucible, containing the material to be evaporated, as the anode, can be moved along the axis of the tube whose inside wall is to be covered with a protective layer. The vacuum arc ignited between the electrodes in the vapours of the evaporating anode material ensures a high deposition rate with low thermal energy transport to the tube wall. This new method can be used for the deposition of various metal layers inside different kinds of tubes (metallic, glass, ceramics or plastics).

• 社団法人応用物理学会の論文
• 1992-09-15

著者

• Musa G

  Inst. Physics And Technology Of Radiation Devices Magurele‐bucharest Rom

• MUSA Geavit

  Institute of Physics and Technology of Radiation Devices

• MUSTATA Ion

  Institute of Physics and Technology of Radiation Devices

• DINESCU Gheorghe

  Institute of Physics and Technology of Radiation Devices

• BAJEU George

  Institute of Physics and Technology of Radiation Devices

• RAICIU Elena

  Institute of Physics and Technology of Radiation Devices

• Dinescu G

  Inst. Pysics And Technol. Radiation Devices Bucharest Rom

関連論文

• Optical Emission Diagnostic of Laser-Induced Plasma during CNX Film Deposition
• Evaporation Source for Deposition of Protective Layers inside Tubes

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