Synthesis and Characterization of Bi_4Ti_3O_<12> Thin Films by Sol-Gel Processing

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Stoichiometric Bi_4Ti_3O_<12> thin films were prepared by sol-gel processing. This paper discusses the synthesis of polymerizable solutions containing Bi and Ti, and characterization of the resulting Bi_4Ti_3O_<12> thin films. The formation of metallic alkoxide and acetate alkoxide are indispensable, soluble precursors for these multicomponent systems. The double alkoxide was prepared by allowing Bi acetate to react with Ti alkoxides. The development of the polymerizable solution system containing Bi and Ti required choosing appropriate solvents and metallo-organic sources for the two components. Bismuth acetate, titanium methoxyethoxide and the solvents 2-methoxy-ethanol and glacial acetic acid were selected based on their successful use in a number of related systems. Thin films of Bi_4Ti_3O_<12> were obtained onto platinized Si substrates by spin casting, followed by heat-treated at 700℃. These films were later characterized by X-ray diffraction and SEM. The measured dielectric and ferroelectric properties of Bi_4Ti_3O_<12> were as follows: dielectric constant 120, dielectric loss 0.5%, remanent polarization P_r=5 μC/cm^2, coercive field E_c= 1.8 kV/cm.
社団法人応用物理学会の論文
1993-09-30