Ferroelectric Properties and Fatigue Characteristics of Bi_4Ti_3O_<12> Thin Films by Sol-Gel Processing (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)

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Stoichiometric Bi_4Ti_3O_<12> thin films were prepared by sol-gel processing. This paper discusses the synthesis of polymerizable solutions containing Bi and Ti, ferroelectric properties and fatigue characteristics of the resulting Bi_4Ti_3O_<12> thin films. The complex alkoxide was prepared by allowing Bi acetate to react with Ti alkoxides. Bismuth acetate and titanium methoxyethoxide, the solvents 2-methoxyethanol and glacial acetic acid were selected based on their successful use in a number of related systems. Thin films of Bi_4Ti_3O_<12> were obtained onto platinized Si substrates by spin casting, followed by heat treated at 700℃. The value of the dielectric constant and loss at 400 Hz, 100 mVrms, 25℃ of this virgin films were 132 and 0.8%, respectively. This thin films with single phase layerd perovskite-like structure had very good D-E hysteresis characteristics. The remnant polarization, P_r, and coercive field, E_c, of this virgin films were 5.5 μC/cm^2 and 6.2 kV/cm, respectively. The remnant polarization of this thin films, P^+_r, P^-_r, and 2P_r, were nearly constant up to 10^8 cycles. At 4×10^8 cycles, the decay in remnant polarization, P^+_r, P^-_r, and 2P_r, was observed to be about 35% of the initial values, respectively. The coercive field was drastically increased after 10^8 cycles. The D-E hysteresis loop after 10^8 cycles was not completely saturated. After 10^8 cycles, leakage current was typically increased. We considered that the fatigue characteristics observed in our study are resulted from increasing of leakage current.
社団法人応用物理学会の論文
1994-09-30

Ferroelectric Properties and Fatigue Characteristics of Bi_4Ti_3O_<12> Thin Films by Sol-Gel Processing (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)

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