Influence of Hydrogen on Electrical Characteristics of Poly-Si Resistor

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概要

• 論文の詳細を見る
• 1993-09-15

著者

• Nakabayashi Masakazu

  Kita-itami Works Mitsubishi Electric Corporation

• IKEGAMI Masaaki

  Kita-Itami Works, Mitsubishi Electric Corporation

• DAIKOKU Tsutomu

  IC Design Center, Kyoei Sangyo Corporation

• Daikoku Tsutomu

  Ic Design Center Kyoei Sangyo Corporation

• Ikegami Masaaki

  Kita-itami Works Mitsubishi Electric Corporation

関連論文

• Photo Chemical Vapor Deposition of Metal Oxide Films Relating to Bi-Sr-Ca-Cu-O Superconductor
• Fluorine Doping and Superconductivity of Nd_2CuO_4 Thin Films
• Influence of Hydrogen on Electrical Characteristics of Poly-Si Resistor
• Detection of Defects in Irradiated Silicon Oxide by X-Ray Photo-Electron Spectrum Difference

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