CH_3OH Concentration and Total Pressure Dependence of Diamond Films Formed from CH_3OH-H_2 Mixed Gas by Magnet-Active Microwave Plasma Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-07-15

著者

• Yamazaki Shumpei

  Semiconductor Energy Laboratory Co., Ltd.

• MIYANAGA Akiharu

  Semiconductor Energy Laboratory Co.,Ltd.

• Yamazaki Shumpei

  Semiconductor Energy Laboratory Co. Ltd.

• KADONO Masaya

  Semiconductor Energy Laboratory Co., Ltd.

• INOUE Tohru

  Semiconductor Energy Laboratory Co., Ltd.

• Kadono Masaya

  Semiconductor Energy Laboratory Co. Ltd.

• Miyanaga Akiharu

  Semiconductor Energy Laboratory Co. Ltd.

• Inoue Tohru

  Semiconductor Energy Laboratory Co. Ltd.

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