Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation

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概要

• 論文の詳細を見る

• A quarter-micron space-and-width linear periodic structures and an array of dot images are obtained with the Nd:YAG 4th harmonic laser irradiation on Kapton polyimide films, poly(ethylene terephthalate) films, spin-coated polyimide films and others. Our solid state Nd:YAG laser source is different from the excimer laser irradiation, in that it provides polarized beams without the need for a polarizer. Atomic force microscope (AFM) and scanning electron microscope (SEM) studies have been carried out. X-ray photoelectron spectroscopy (XPS) studies of laser-exposed areas indicate that no significant chemical reactions took place on exposed areas.

• 社団法人応用物理学会の論文
• 1993-12-30

著者

• Hiraoka Hiroyuki

  The Hong Kong University Of Science Ad Technology Department Of Chemistry

• Sendova M

  Hong Kong Univ. Science And Technology Hkg

• Sendova Mariana

  The Hong Kong University Of Science And Technology Department Of Chemistry

• SENDOVA Mariana

  The Hong Kong University of Science ad Technology, Department of Chemistry

関連論文

• Sub-1 /4-μm Periodic Patterns with Nd:YAG Laser and Image Transfer to Silicon Surface by Reactive Ion Etching
• Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation

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