Accuracy of Surface Acoustic Wave Velocity Measured to Determine the Elastic Constants on LiTaO_3 Substrate
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概要
- 論文の詳細を見る
Elastic constants can be determined from the experimental values of surface acoustic wave (SAW) velocities. In this paper, the measurement accuracy of SAW velocities is numerically obtained to determine elastic constants and their temperature coefficients. The velocities must be measured with an accuracy of more than 0.001 m/s and the temperature characteristics of more than 0.0001 ppm/℃.
- 社団法人応用物理学会の論文
- 1993-05-30
著者
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Shimizu Yasutaka
CRADLE, Tokyo Institute of Technology
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YAMAMOTO Kouichi
CRADLE, Tokyo Institute of Technology
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Shimizu Yasutaka
Graduate School Of Decision Science And Technology Tokyo Institute Of Technology
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Shimizu Y
Osaka Univ. Osaka Jpn
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Shimizu Yasutaka
Cradle Tokyo Institute Of Technology
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Yamamoto Kouichi
Cradle Tokyo Institute Of Technology
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