Evaporation of Silicon by Vacuum-Arc Discharge

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1969-02-05

著者

• Naoe Masahiko

  Tokyo Institute Of Technology

• YAMANAKA Shunichi

  Tokyo Institute of Technology

関連論文

• Structure of Ferrite Films Deposited by Vacuum-Arc Discharge
• Nickel Ferrite Thick Films Deposited by Vacuum-Arc Discharge
• Vacuum-Arc Evaporations of Ferrites and Compositions of Their Deposits
• Evaporation of Silicon by Vacuum-Arc Discharge
• Vacuum Deposition of Ferrite Films by Arc Discharge
• Magnetic Properties of Ferrite Films Deposited by Vacuum-Arc Discharge
• CuCr_2Se_4 Films by Simultaneous Vacuum Deposition from Separate Sources
• Novel Technologies for High-Performance Hard Disk Drives
• Preparation of SnO_2 Films by D.C. Glow Discharge Sputtering

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