Vacuum-Arc Evaporations of Ferrites and Compositions of Their Deposits

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The evaporation in a vacuum of the order of 10^<-4> torr with a current of 14 A is investigated by e1ectron-microscopic observation of the surface of the ferrite source, spectroscopic analysis of the vapour emission and composition analysis of the discharge atmosphere. Ferrite is thermally decomposed to release oxygen gas in the region of cathode spots. Most of the constituent metals are evaporated in the state of atom. The difference in cation ratio Me/Fe between the source and its deposit is rather small, where Me is one of Mg, Mn, Co, Ni, Cu and Zn. The evaporation rate of each metal depends on the temperature at which its vapour pressure is 10^<-2> torr. If the source composition is carefully controlled, it is possible to make the cation ratio of its deposit adequate for typical simple ferrites, and even mixed ferrites, such as Ni_<0.3>Zn_<0.7>Fe_2O_4 and (N_<0.85>CU_<0.15>)_<0.94>Fe_^<2.06>O_4.
社団法人応用物理学会の論文
1971-06-05