The Effect of Gas Pressure in RF Ion Sources
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1967-07-05
著者
-
Ogawa Kazuyuki
Central Research Laboratory Tokyo Shibaura Electric Co. Ltd.
-
Ogawa Kazuyuki
Central Research Laboratory Tokyo Shibaura Electric Co.
-
KAWASAKI Shinsuke
Central Research Laboratory, Tokyo Shibaura Electric Co., Ltd.
-
Kawasaki Shinsuke
Central Research Laboratory Tokyo Shibaura Electric Co. Ltd.
関連論文
- The Observation of Oscillating Anode Glow by Means of High-Speed Camera
- The Effect of Gas Pressure in RF Ion Sources
- Plasma Density Dependence of RF Ion Sources
- Anodic Oscillation in Glow Discharge : (II) The Gap Properties, Analogous to an Ordinary Electric Oscillator with Linear Circuit Elements