Plasma Density Dependence of RF Ion Sources
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1967-02-15
著者
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Ogawa Kazuyuki
Central Research Laboratory Tokyo Shibaura Electric Co. Ltd.
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Ogawa Kazuyuki
Central Research Laboratory Tokyo Shibaura Electric Co.
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KAWASAKI Shinsuke
Central Research Laboratory, Tokyo Shibaura Electric Co., Ltd.
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Kawasaki Shinsuke
Central Research Laboratory Tokyo Shibaura Electric Co. Ltd.
関連論文
- The Observation of Oscillating Anode Glow by Means of High-Speed Camera
- The Effect of Gas Pressure in RF Ion Sources
- Plasma Density Dependence of RF Ion Sources
- Anodic Oscillation in Glow Discharge : (II) The Gap Properties, Analogous to an Ordinary Electric Oscillator with Linear Circuit Elements