Measurement of the Distribution of Phosphorus Diffused in Silicon Dioxide Film Using ^<32>P as a Tracer

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1967-03-15

著者

• Yohsida Masayuki

  The Electrical Communication Laboratory

• Watanabe Yoshio

  The Electrical Communication Laboratory

関連論文

• Molecular Structure and Cracks of Films Formed by Gas Phase Reaction of SiH_4 and NH_3
• Measurement of the Distribution of Phosphorus Diffused in Silicon Dioxide Film Using ^P as a Tracer

スポンサーリンク