Etch Pits Observed in Dislocation-Free Silicon Crystals
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1966-05-15
著者
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ABE Takao
Semiconductor Research Lab., Shin-etsu Handotai Co., LTD.
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Samizo Takahide
Semiconductor Division Shin-etsu Chem. Ltd.
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Maruyama Shigeru
Semiconductor Division Shin-etsu Chem. Ltd.
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Maruyama Shigeru
Semiconductor Division Shin-etsu Chem. Ind. Co. Ltd.
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Abe Takao
Semiconductor Division Shin-etsu Chem. Ltd.
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Abe Takao
Semiconductor Division Shin-etsu Chem. Ind. Co. Ltd.
関連論文
- A Thick and Large Active Area Si(Li) Detector
- Etch Pits Observed in Dislocation-Free Silicon Crystals
- Observations of Defects in Silicon Single Crystals