Excess Energy Measurement of Ion Beam from High Frequency Ion Source

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概要

• 論文の詳細を見る

• The excess energy of an ion beam from a high frequency ion source was measured by using a high frequency ion source with mesh grid. The ion source was operated using unusual electrical connections. The results suggest that the excess energy is due to the increase of plasma potential caused by energetic electrons. By the use of an electrical shielding screen, it is shown that the axial component of the electric field from the high frequency coil is only a fractional source of the excess energy.

• 社団法人応用物理学会の論文
• 1966-04-15

著者

• Tsuchimoto Takashi

  Hitachi Central Research Laboratory

関連論文

• Excess Energy Measurement of Ion Beam from High Frequency Ion Source
• Source d'ions pulsee du type haute frequence
• Electron Current Release Characteristics of a High Frequency Ion Source with Mesh Grid

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