Electron Current Release Characteristics of a High Frequency Ion Source with Mesh Grid
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概要
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Electron current was observed from a high frequency ion source with mesh grid in a similar way to get ion beam current. The experimental results suggest that the main cause is the extraction of electrons by the convergence electrode from a plasma, which is formed by an ion beam in the extraction canal and in the convergence pipe.
- 社団法人応用物理学会の論文
- 1965-06-15
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- Electron Current Release Characteristics of a High Frequency Ion Source with Mesh Grid