Fabrication of Micro-Elements Resistors by Electron Beam

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1964-10-15

著者

• Kimura Hirokazu

  Hitachi Central Research Laboratory

• Tamura Hifumi

  Hitachi Lid. Central Research Laboratory

• Tamura Hifumi

  Hitachi Central Research Laboratory

関連論文

• Stable Field Emission of Electrons from Liquid Metal
• Fabrication of Micro-Elements Resistors by Electron Beam
• Vacuum Evaporator with an Improved Electron Bombardment Heating Unit
• Estimation of Radiation Damage and Pattern Resolution in Ion Direct Writing Using Scattering of Low Energetic Ions
• Measurement of the Lifetime of Minority Carriers in Semiconductors with a Scanning Electron Microscope

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