Length Measurement of Gauge Blocks Using a 3.39 μm He-Ne Laser Interferometer

概要

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An infrared interferometer is described for length measurement which uses a simply stabilized 3.39 μm He-Ne laser as a light source and has a piezoelectric-transducer scanning system for recording interference fringes of two fields of view simultaneously and automatically. Pointing accuracy of the order of interference obtained is estimated to be 0.5° in phase. Using this interferometer, the refractive index of air at a wavelength of 3.39 μm is measured with an accuracy of 3×10^<-8> and Edlen's dispersion formula is confirmed with an accuracy of less than one part in 10^7. The length of a gauge block of nominal length 200 mm is measured with an accuracy of 5×10^<-8> in standard deviation.
社団法人応用物理学会の論文
1980-04-05